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    • GHz Range SAW Transducers Using Electron Beam Lithography 

      Yamanouchi, Kazuhiko; Meguro, Toshiyasu; Cho, Yasuo (Wydawnictwo Naukowe Uniwersytetu im. Adama Mickiewicza w Poznaniu, 1990)
      Nanometer electrodes of the order of 0.085 μm width have been fabricated using direct electron beam lithography, normal lift-off techniques and 0₂-plasma cleaning system. These techniques have been applied to Inter-Digital ...